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| Zhengzhou Ketan Instrument Equipment Co., Ltd |
| Contacts：Mr.Song |
| Phone：0371-60308298 |
| E-mail：zzkejing@qq.com |
| Address：Floor 3, block K, building 6, innovation park, West Third Ring University Science Park, Zhengzhou City, Henan Province |
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Small sputtering instrument |
Classification：Material sample handling |
Hotline：0371-60308298 |
Product introduction：Small benchtop sputtering power controllable magnetron sputtering instrument, equipped with voltage and current feedback, sample stage rotation, sample height adjustment, and electric shutter function. By regularly adjusting the pre-sputtering power and film deposition power, most metals can be physically deposited uniformly. The vacuum chamber is made of transparent quartz glass to reduce sample contamination. The sample stage can be rotated to obtain a more uniform film, and various metal films can be prepared. . |
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Small benchtop sputtering power controllable magnetron sputtering instrument, equipped with voltage and current feedback, sample stage rotation, sample height adjustment, and electric shutter function. By regularly adjusting the pre-sputtering power and film deposition power, most metals can be physically deposited uniformly. The vacuum chamber is made of transparent quartz glass to reduce sample contamination. The sample stage can be rotated to obtain a more uniform film, and various metal films can be prepared. .
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control method |
7 inch man-machine interface manual automatic mode switching control |
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Sputtering power supply |
DC sputtering power supply |
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Coating function |
0-999 seconds 5-stage variable power and baffle position and sample speed program |
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power |
≤1000W |
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output voltage current |
Voltage≤1000V Current≤1A |
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vacuum |
Mechanical pump ≤5Pa (5 minutes) Molecular pump ≤5*10^-3Pa |
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sputtering vacuum |
≤30Pa |
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Baffle Type |
Electronic control |
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vacuum chamber |
Quartz + stainless steel cavity φ160mm x 170mm |
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Sample stage |
Rotatable φ62 (φ50 base can be installed) |
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Sample stage speed |
8 rpm |
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Sample sputtering source adjustment distance |
40-105mm |
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Vacuum measurement |
Pirani vacuum gauge (installed measuring range 10E5Pa 1E-1Pa) |
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Reserve vacuum port |
KF25 air outlet KF16 air outlet 6mm card sleeve air inlet |
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